5N Hydrogen Chloride Gas (HCl Gas)
General Introduce
Hydrogen chloride is colorless, liquefied gas with pungent odor at room temp.
The 5N and 5.5N hydrogen chloride gas are mainly used in the electronics industry, especially in the semiconductor wafer process and LED manufacturer industries. They facilitate the growth of epitaxial films of silicon, germanium, and III-V materials. Additionally, they are used to remove surface oxides and etch metallic thin films.
Characteristics
Colorless, liquefied gas with a pungent odor. It is toxic, irritating, and suffocating, but it is non-flammable.
HCl gas is highly hygroscopic, it absorbs moisture from the air and forms hydrochloric acid, which is highly corrosive.
It is typically stored in packaging as a liquefied gas under constant pressure (3-6 MPa), which varies depending on the temperature.
Technical Specification
Purity grade | Typical purity | H2O | Standard for total impurities | HYTF* QC for total impurities. |
5N | 99.999% | ≤0.65ppm | / | ≤10ppm |
Purity refers to the measurement of the purity of hydrogen chloride gas according to GB/T14602-2014 standard. Detection method: GB/T14602 Total impurities：oxygen, argon, carbon monoxide, carbon dioxide, hydrocarbons, as well as metal ions including iron, copper, cobalt, chromium, and nickel. *HYTF refers to Shandong HuaYuTongFang Electronic Materials Co.,Ltd. | ||||
Physical Data
Product Hazardous Material Label | Grade 2.3 gases | ||
CAS No. | 7647-01-0 | UN No. | 1050 |
Molecular weight | 36.46 | Boiling point (Atmospheric pressure) | -85℃ |
Density (0℃，0.1MPa） | 1.639g/dm³ | Density (21℃,0.1MPa） | 1.522g/ dm³ |
specialty gravity/water （10℃，w=1） | 0.88 | specialty gravity/air (0℃，air=1) | 1.268 |
Volume 1L Liquid(10℃) | 540L gases（standard） | Volume 1KG Liquid(10℃) | 613L gases（standard） |
Packaging Information
Packaging type | Cylinder internal volume (Liters/ Cylinder) | Fill contents （KG） | Cylinder tare weigh（KG） | Max quantity (Packages /20GP) | Valve Options |
Cylinder | 44 | 25 | 50 | 160 | CGA-330 JIS-26R DIN-8 DISS-634 |
Cylinder | 47 | 27 | 52 | 160 | |
Y Cylinder | 440 | 250 | 666 | 6 | |
Y Cylinder | 880 | 500 | 1454 | 6 | |
T Cylinder | 1000 | 660 | 1454 | 6 | |
Tube Trailer | 10000 | 6000~7000 | / | 1 |
Valve Options
We provide and equip with four different valve options to meet your requirements.
Valve option | Reference photo | Cylinder diameter | Valve outlet |
CGA-330 |
| 3”4-14 | CGA-330 |
DISS-634 |
| 3”4-14 | DISS-634 |
JIS-26R |
| 3”4-14 | JIS26R |
DIN-8 |
| 3”4-14 | DIN-8 |
Contact
Address：Levima Building, R&D Hub, Wujin District, Changzhou, Jiangsu, PR China
Phone：+86-15994154838 / +86-519-88852617
Please feel free to drop us email for product inquiry：inquiry@hytfgasses.com
Notice:
The above product information, suggestions, and recommendations are only intended for product promotion, basic safety operation guidance, and usage reference.
For more safety and recommended operating protection information, please refer to product safety data sheet (SDS).
This introduction does not exempt customers from their responsibility for product quality inspection.
Address：Levima Building, R&D Hub, Wujin District, Changzhou, Jiangsu, PR China
Phone：+86-15994154838 / +86-519-88852617
E-mail：inquiry@hytfgasses.com 
Address：http://www.hytfgases.com 
